LPT+ Cx

產品介紹 PRODUCTS

The fully automatic Fortrend LPT+ Cx model transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.

With a total footprint not much larger than a SMIF pod, the LPT+ Cx-X is easy to integrate with AGV system and into small areas.

A programmable robotic arm and end effector that can tilts 90˚ and do extra 85mm lateral movements supporta wide variety of process tools that cannot be used with standard models.

With 1507mm height, LPT+ Cx-X can connect to process tool without blocking operation panel or monitor screen right above the load lock.

Features

Less than 90-second cycle time maximizes production
Small footprint saves valuable FAB floor-space
Tilt and Slide end effector meets special customer requirements
Adjustable loading height provides ergonomic efficiency
Built-in mini-environment and clean airflow system maintain Class 1 cleanliness
CE and S2S8 certification

Simple to Maintain

All LPT+ models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.

Safe and Reliable

A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.

With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the LPT+ Cx-X is the best choice for both OEMs and system integrators.

Outstanding Support

Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.

Established in 1979, Fortrend's expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.

Type Information

LPT+ Cx-X
①-③
①:Compact body with Slider option –View from operator side
R –Right Hand (Slider moves to left)
L –Left Hand (Slider moves to right)
②:Utility Side – View from operator side
R – Right Hand Side
L – Left Hand Side

Class 1 Cleanliness
<0.1 PWP @ 0.2 μm or greater size particles
<90-second cycle time (with tilt and lateral movements)
2,000 hours MTBF

Latches unlock the SMIF pod, Mini-environment risesand lifts the SMIF pod cover while maintaining Class 1 cleanliness inside SMIF pod. Robot arm picks up cassette andplaces it on to process tool stage. Process is reversed forunloading.

Cassette present and wafer protrusion sensors
Cassette overload sensor
Static-dissipative plastic windows
Fail-safe cassette gripper
Built-in diagnostics
PIO safety interlocks and programmable macros
Power failure recovery system automatically returns
cassette to home position

Parallel I/0 (SEMI E23-96) 8 inputs / 8 outputs
EIA-RS232(SECS I/II)

56x35x151.6cm (22x13.7x59.6 inches)
90cm standard load height, adjustable
93kg(206 lbs) total weight

100~240v AC standard, single-phase, 50/60Hz, 3 amps

IR Link/RFID System/IR-RF combo(options)
Specifications subject to change without notice

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