公司介紹 ABOUT
關於天燿
天燿股份有限公司（由原台灣富創得工程(股)公司于2024年10月更名）成立於2008年。是一個具有自主IP產權的半導體設備研發、製造、銷售客服產品公司。公司提供3大產品路綫：（1）SMIF生產綫全自動密閉盒上下料load ports和物料管控ID（IR和RFID）自動化系統；（2）高精度無塵wafer robot和設備前端自動化系統（EFEM/Sorter）; (3)高溫無塵無氧晶圓烘烤箱（thermal curing oven）和批量生產自動化整合系統。
天燿股份有限公司SMIF上下料系統核心技術傳承於美國SMIF技術發明人 Fortrend Engineering，經過近20年的技術積累以及市場經驗，公司于2024年推出LPT+系列的全新200mm和300mm的SMIF load ports。在 wafer robot產品方面，公司也推出了全新的 Bravo系列robots，在產能、精度、穩定性、和無塵潔净度四方面，完美的提供目前市面上性價比最高的robot產品綫，也為公司提供的標準Sorter和客製化EFEM提供了更强大的市場競爭力。公司的FVO 烤箱系列，采用公司最新的多軸溫控技術，在(+60~450度) 的全程溫控範圍内，可以保證 (+/- 1%)設定溫度的溫控均匀度，并且在全程溫控範圍内保證優于Class-10的腔體内潔净度，提供了市場競爭的最高標準。公司的oven系統也因此贏得國內外先進晶圓廠訂單，成為三維積體電路(3DIC)高階封裝製程的設備的主流供應商。
天燿股份有限公司SMIF上下料系統核心技術傳承於美國SMIF技術發明人 Fortrend Engineering，經過近20年的技術積累以及市場經驗，公司于2024年推出LPT+系列的全新200mm和300mm的SMIF load ports。在 wafer robot產品方面，公司也推出了全新的 Bravo系列robots，在產能、精度、穩定性、和無塵潔净度四方面，完美的提供目前市面上性價比最高的robot產品綫，也為公司提供的標準Sorter和客製化EFEM提供了更强大的市場競爭力。公司的FVO 烤箱系列，采用公司最新的多軸溫控技術，在(+60~450度) 的全程溫控範圍内，可以保證 (+/- 1%)設定溫度的溫控均匀度，并且在全程溫控範圍内保證優于Class-10的腔體内潔净度，提供了市場競爭的最高標準。公司的oven系統也因此贏得國內外先進晶圓廠訂單，成為三維積體電路(3DIC)高階封裝製程的設備的主流供應商。
產品介紹 PRODUCTS
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LPT+ S
The fully automatic Fortrend LPT+ S transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the LPT+ S-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm with end-effector that tilts wafers into the vertical position accommodates a wide variety of process tools.
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LPT+ Sx
The fully automatic Fortrend LPT+ Sx transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the LPT+ Sx is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that can tilts 90˚ and does extra 85mm lateral movement supporta wide variety of process tools that cannot be used with standard models.
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LPT+ Cx
The fully automatic Fortrend LPT+ Cx model transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the LPT+ Cx-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that can tilts 90˚ and do extra 85mm lateral movements supporta wide variety of process tools that cannot be used with standard models.
With 1507mm height, LPT+ Cx-X can connect to process tool without blocking operation panel or monitor screen right above the load lock. -
LPT+ R
The fully automatic Fortrend LPT+ R-X transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the LPT+ R-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that rotates 350˚ offers angled cassette placement and small chamber space that cannot be accessed by any other existing SMIF solutions. PLPT+ R model illustrates another engineering excellence of Fortrend products.