The fully automatic Fortrend LPT+ S transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.

With a total footprint not much larger than a SMIF pod, the LPT+ S-X is easy to integrate with AGV system and into small areas.

A programmable robotic arm with end-effector that tilts wafers into the vertical position accommodates a wide variety of process tools.

The fully automatic Fortrend LPT+ Sx transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.

With a total footprint not much larger than a SMIF pod, the LPT+ Sx is easy to integrate with AGV system and into small areas.

A programmable robotic arm and end effector that can tilts 90˚ and does extra 85mm lateral movement supporta wide variety of process tools that cannot be used with standard models.

The fully automatic Fortrend LPT+ Cx model transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.

With a total footprint not much larger than a SMIF pod, the LPT+ Cx-X is easy to integrate with AGV system and into small areas.

A programmable robotic arm and end effector that can tilts 90˚ and do extra 85mm lateral movements supporta wide variety of process tools that cannot be used with standard models.

With 1507mm height, LPT+ Cx-X can connect to process tool without blocking operation panel or monitor screen right above the load lock.

The fully automatic Fortrend LPT+ R-X transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.

With a total footprint not much larger than a SMIF pod, the LPT+ R-X is easy to integrate with AGV system and into small areas.

A programmable robotic arm and end effector that rotates 350˚ offers angled cassette placement and small chamber space that cannot be accessed by any other existing SMIF solutions. PLPT+ R model illustrates another engineering excellence of Fortrend products.