Features：
• Small footprint saves valuable FAB floor space
• Class 1 cleanliness with active self-clean air flow design.
• Lifts the Pod shell leaving the Wafer Cassette in a sealed mini-environment
• All electrical system with field programmable application software
• Four programmable Interlock signals
• Wafer Cassette Present Sensor
• Pod Present Sensor
• Wafer/Reticle Mapping Sensor (Present, Cross Slot)
• Meets SEMI E19.4, S2 and S8 standards and CE certified
• Mounts directly into a process Tool or to a manual load port adaptor (300mm Bolts interface to SEMI E63) to convert open station to a SMIF compatible station.
• Optional RFID reader/writer
• Optional IR reader/writer