產品介紹 PRODUCTS
200 / 300mm Wafer Sorter & EFEM
• 300 mm/200mm wafers transfers
• Class 1 environment with integrated ionizers
• Compact footprint with field proven chassis design
• Simple graphic user interface with touch screen
• SECS/GEM capabilities
• Reliable performance using Fortrend field proven load port and robot
• Wafer alignment and notch finding
• Support 200mm cassette adaptor on 300mm load ports
• Wafer ID (OCR) reading
• RFID/Smart Tag/Barcode reading
• Ultra-Thin Wafer (Optional)
• No Touch End Effectors(Optional)
• Class 1 environment with integrated ionizers
• Compact footprint with field proven chassis design
• Simple graphic user interface with touch screen
• SECS/GEM capabilities
• Reliable performance using Fortrend field proven load port and robot
• Wafer alignment and notch finding
• Support 200mm cassette adaptor on 300mm load ports
• Wafer ID (OCR) reading
• RFID/Smart Tag/Barcode reading
• Ultra-Thin Wafer (Optional)
• No Touch End Effectors(Optional)