產品介紹 PRODUCTS
PLS 200系列
Feattures
• Ullttra smallll ffoottpriintt saves valluablle ffab fflloor space
• LED Sttattue IIndiicattor
• Ullttra smallll ffoottpriintt saves valluablle ffab fflloor space
• LED Sttattue IIndiicattor
Specification
General
Compliant with SEMI specification
Electric：
- 110/220VAC, 50/60Hz, 30W
- Open/Close switch
- Led indicator
Mechanical：
- Size: 340Wx 430Dx 119H
- Weight: 6.5Kg
- Load capacity: 12Kg
- Pod interface: E19.4-0697
- Open Pod < 6 second
- Close Pod < 6 second
- Lock accurate: +- 1 degree
Specifications are subject to change without prior notice.