產品介紹 PRODUCTS
PLM-200W / PLM-200R
Features：
• Small footprint saves valuable FAB floor space
• Class 1 cleanliness with active self-clean air flow design.
• Lifts the Pod shell leaving the Wafer Cassette in a sealed mini-environment
• All electrical system with field programmable application software
• Four programmable Interlock signals
• Wafer Cassette Present Sensor
• Pod Present Sensor
• Wafer/Reticle Mapping Sensor (Present, Cross Slot)
• Meets SEMI E19.4, S2 and S8 standards and CE certified
• Mounts directly into a process Tool or to a manual load port adaptor (300mm Bolts interface to SEMI E63) to convert open station to a SMIF compatible station.
• Optional RFID reader/writer
• Optional IR reader/writer
• Small footprint saves valuable FAB floor space
• Class 1 cleanliness with active self-clean air flow design.
• Lifts the Pod shell leaving the Wafer Cassette in a sealed mini-environment
• All electrical system with field programmable application software
• Four programmable Interlock signals
• Wafer Cassette Present Sensor
• Pod Present Sensor
• Wafer/Reticle Mapping Sensor (Present, Cross Slot)
• Meets SEMI E19.4, S2 and S8 standards and CE certified
• Mounts directly into a process Tool or to a manual load port adaptor (300mm Bolts interface to SEMI E63) to convert open station to a SMIF compatible station.
• Optional RFID reader/writer
• Optional IR reader/writer
Specifications
- Reticle size：150mm W x 150mm D x 6.35mm H
- Dimension：370W x 400D x650H mm
- Elevator Stroke：240 mm
- Load capacity：5.4kg
- Pod interface SEMI E19.4
- Power requirement：110V/220V 3A/1.4A 50/60Hz (24 VDC Optional)
- Weight：23kg without Pod
- Open Pod：< 12 seconds
- Close Pod：< 10 seconds
- MCBF：50,000 cycles
- MTTR：< 1 hour
- Pod PIP sensor：1 set
- Wafer Protrusion Sensor：1 set
- Cassette Present Sensor：1 set
- Cassette Protrusion Sensor：1 set
- Wafer Mapping Sensor：1 set
- Communication：Parallel and/or Serial
- Communication (Optional)：EIA-RS232C(SECS I/II)
- ID device(Optional)：RFID module or IR Link
- Operation：Local operation or Host comm
- Optional：Load Port Adaptor