LPT+ R

產品介紹 PRODUCTS

The fully automatic Fortrend LPT+ R-X transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.

With a total footprint not much larger than a SMIF pod, the LPT+ R-X is easy to integrate with AGV system and into small areas.

A programmable robotic arm and end effector that rotates 350˚ offers angled cassette placement and small chamber space that cannot be accessed by any other existing SMIF solutions. PLPT+ R model illustrates another engineering excellence of Fortrend products.

Features

Less than 90-second cycle time maximizes production
Small footprint saves valuable FAB floor-space
Rotating end effector meets special customer requirements
Adjustable loading height provides ergonomic efficiency
Built-in mini-environment and clean airflow system maintain Class 1 cleanliness
CE and S2S8 certification

Simple to Maintain

All LPT+ models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.

Safe and Reliable

A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.

With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the LPT+ R-X is the best choice for both OEMs and system integrators.

Outstanding Support

Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.

Established in 1979, Fortrend's expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.

Type Information

LPT+ R-X

①-②

①: R – Rotary Type

②: Utility Side – View from operator side

R – Right Hand Side

L – Left Hand Side

Class 1 Cleanliness

<0.1 PWP @ 0.2 μm or greater size particles

<90-second cycle time

2,000 hours MTBF

Latches unlock the SMIF pod, Mini-environment rises and lifts the SMIF pod cover while maintaining Class 1 cleanliness inside SMIF pod. Robot arm picks up cassette and places it on to process tool stage. Process is reversed for unloading.

Cassette present and wafer protrusion sensors

Cassette overload sensor

Static-dissipative plastic windows

Fail-safe cassette gripper

Built-in diagnostics

PIO safety interlocks and programmable macros

Power failure recovery system automatically returns

cassette to home position

Parallel I/0 (SEMI E23-96) 8 inputs / 8 outputs

EIA-RS232(SECS I/II)

50x35x184cm(20x13.7x72.4 inches)

90cm standard load height, adjustable