產品介紹 PRODUCTS
LPT+ S
With a total footprint not much larger than a SMIF pod, the LPT+ S-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm with end-effector that tilts wafers into the vertical position accommodates a wide variety of process tools.
Features
- Less than 90-second cycle time maximizes production
- Small footprint saves valuable FAB floor-space
- Tilt and Straight end-effector meets special customer requirements
- Adjustable loading height provides ergonomic efficiency
- Built-in mini-environment and clean airflow system maintain Class 1 cleanliness
- CE and S2S8 certification
With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 500 S-X is the best choice for both OEMs and system integrators.
Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend's expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.
Cassette Type |
X(mm) |
Y(mm) |
Z(mm) |
Cassette Type |
X(mm) |
Y(mm) |
Z(mm) |
K200-79MTH1- |
0 |
0 |
0 |
K198-80MBRI |
0 |
13.1 |
12.8 |
KA200-85MT |
0 |
0 |
0 |
KA202-80SHH |
0 |
10.8 |
12.8 |
K213-80SHHI |
0 |
13.1 |
12.8 |
A192-80M-0215 PFA |
0 |
12 |
12.8 |