產品介紹 PRODUCTS
300mm Loadport
Standard Features
- Compatible with SEMI 300mm FOUP
- loadport standards E15.1, E47.1, E57, E62,
- E64, E83, E110, S2, S8
- Compliant with both SEMI E63 BOLTS-M
- and E92 BOLTS Light interface standards
- Load port status sensing functions
- FOUP Present
- FOUP Placement
- FOUP Dock
- FOUP Door Present
- Wafer Protrusion
- Finger pinch sensor
- Vacuum Pressure
- Modular design minimizes adjustments, maintenance and downtime
- RS232 communication interface
- Mapping Function
- Class 1 Cleanliness
- S2S8 Certification
Options:
- Optical PIO sensor
- Info Pad sensor
- N2 purge interface
- 200mm adaptor
- 200mm wafer mapping
- 200mm wafer cassette RFID Reader/Writer
Specification
|
Model |
FO-3100-XYZ |
||
|
Wafer Size |
300mm |
||
|
Carrier Type |
300mm FOUP Compile with SEMI 47.1 |
||
|
Dimension |
472(W)X493(D)X1386(H) |
||
|
Weight |
66 kg |
||
|
Mounting |
Mounting Point |
900mm±10mm |
|
|
Bolting |
ISO M8-6H |
||
|
Cleanliness |
|
Class1@0.1μm |
|
|
Operation Time |
With Mapping |
||
|
FOUP open: 17 sec |
|||
|
FOUP Close: 10 sec |
|||
|
Communication |
Serial RS-232, Parallel I/O |
||
|
RFID Reader / Writer |
TI 134.2kHz |
||
|
Facility Requirement |
Electricl |
+24VDC, 5A |
|
|
Vacuum |
- 80kpa |
||
|
CDA |
5kg/cm² |
||
Model List
|
Model |
Part Number |
Features |
||||
|
12" RFID |
Infor Pad |
N2 Purge |
8" wafer Mapping |
8" RFID |
||
|
FO-3100-111 |
9A74-00001 |
V |
V |
V |
|
|
|
FO-3100-110 |
9A74-00002 |
V |
V |
|
|
|
|
FO-3100-101 |
9A74-00003 |
V |
|
V |
|
|
|
FO-3100-100 |
9A74-00004 |
V |
|
|
|
|
|
FO-3100-000 |
9A74-00005 |
|
|
|
|
|
|
FO-3100-011 |
9A74-00006 |
V |
V |
|
|
|
|
FO-3100-001 |
9A74-00007 |
|
|
V |
|
|
|
FO-3100-010 |
9A74-00008 |
V |
|
|
||
|
FO-3100-110 |
9A74-00009 |
V |
V |
|
V |
|
|
FO-3100-110 |
9A74-00010 |
V |
V |
|
V |
V |