產品介紹 PRODUCTS
300mm Loadport (All Axes Electric Driving)
Model:FO-3200-XYZ
Standard Features
- Compatible with SEMI 300mm FOUP
- Load port standards E15.1, E47.1, E57, E62, E64, E83, E110, S2, S8
- Compliant with both SEMI E63 BOLTS-M and E92 BOLTS Light interface standards
- Load port status sensing functions
- FOUP Present
- FOUP Placement
- FOUP Dock
- FOUP Door Present
- Wafer Protrusion
- Finger pinch sensor
- Modular design minimizes adjustments, maintenance and downtime
- RS232/TCPIP communication interface
- Mapping Function
- All axes electric driving. No air/vacuum required
- Web GUI maintenance program
- Class 1 Cleanliness
- S2S8/CE Certification
Options:
- Info Pad sensor
- N2 purge interface
- 200mm adaptor
- 200mm wafer mapping
- 200mm wafer cassette RFID Reader/Writer
Specification
|
Model |
FO-3200-XYZ |
|
|
Wafer Size |
300mm |
|
|
Carrier Type |
300mm FOUP Compile with SEMI 47.1 |
|
|
Dimension |
472(W)X493(D)X1386(H) |
|
|
Weight |
70 kg |
|
|
Mounting |
Mounting Point |
900mm±10mm |
|
Bolting |
ISO M8-6H |
|
|
Cleanliness |
|
Class1@0.1μm |
|
Operation Time |
With Mapping |
|
|
FOUP open: 17 sec |
||
|
FOUP Close: 10 sec |
||
|
Communication |
Serial RS-232, TCPIP |
|
|
RFID Reader / Writer |
TI 134.2kHz |
|
|
Facility Requirement |
Electrical |
+24VDC, 3A |
Model List
|
Model |
Features |
||
|
12" RFID |
Info Pad Sensor |
N2 Purge |
|
|
FO-3200-111 |
V |
V |
V |
|
FO-3200-110 |
V |
V |
|
|
FO-3200-101 |
V |
|
V |
|
FO-3200-100 |
V |
|
|
|
FO-3200-000 |
|
|
|
|
FO-3200-011 |
V |
V |
|
|
FO-3200-001 |
|
|
V |
|
FO-3200-010 |
V |
|
|
|
Model Number indicate FO-3200-XYZ X: ID device, 0: no, 1:RFID, Y: Info pad sensor, 0:no, 1: yes Z: N2 purge, 0:no, 1: yes. |